Wide range of solutions on display
The UltiDry P1820 multi-stage roots vacuum pump was a central feature of the booth. Engineered for optimal efficiency and reliability, the UltiDry meets the stringent requirements of the semiconductor industry. A holographic display accompanied the vacuum pump, vividly showcasing its energy-efficient capabilities in challenging semiconductor applications. Additionally, a spinning LED hologram featured an animated UltiDry mascot, catching the attention of passing visitors.The new product Series E of electric angle valves was also presented. These have been developed for high vacuum applications and set an industry standard with superior control, energy efficiency, reliability, and significant cost savings. Series E offers an electric actuation system that is first in its class, designed for precision and robust performance. It features a failsafe mechanism to maintain safety during power losses and a local mode for manual operation during maintenance. This reduces mechanical stress and ensures consistent, safe performance. The valves are reliable for critical settings, ranging from 10-3 to 10-9 hPa (mbar).
As a representation of the gas abatement systems offered by Pfeiffer, a full-size mock-up of the CT-TW-H thermal-wet hybrid gas abatement system was on display at the booth. This system operates using hydrogen-injected combustion technology – an effective method for selectively destroying exhaust gases, particularly perfluorocarbons (PFCs). It delivers high uptime, robust environmental performance, and easy maintenance, all of which are critical for sustainable semiconductor manufacturing.